| http://www.w3.org/ns/prov#value | - A manufacturing method thereof will be described with reference to FIGS. 6A to 6F and FIGS. 7A to 7E. In FIG. 6A, a substrate such as a glass substrate, such as barium borosilicate glass or aluminum borosilicate glass, typically Corning Corp. #7059 or #1737, is used as a substrate 301.
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