About: http://webisa.webdatacommons.org/88480531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	atomic layers of a film (see figure 4-11) and can be used to detect all elements except H
http://www.w3.org/ns/prov#wasQuotedFrom	ufl.edu