About: http://webisa.webdatacommons.org/88880309

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, when doping such as P is performed in-situ during SEG process, there is a problem that the speed of SEG is reduced since securing of selectivity is difficult.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr