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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	lectrical characteristics of a TFT. [0007] In contrast, Japanese Patent Application Laid-open No. Hei 7-183540 discloses a technique of crystallizing a silicon semiconductor film by adding a metal element such as nickel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr