| http://www.w3.org/ns/prov#value | - Alternative substrate materials are: InSb, Si, metals such as Cu, Ag, Au, and amorphous materials such as SiO2. [0089] It will also be apparent to persons skilled in the art that silicon, or any other material that can be converted into a sputter etch-masking material by oxidation or other means, may be used instead of an aluminium compound in the embodiment of FIG. 4. [0090] It will
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