About: http://webisa.webdatacommons.org/88943034

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A liquid supply system member compensator may reduce some or all of the problems described above by compensating for any gravity or other force induced effects between the liquid supply system member and substrate table.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es