About: http://webisa.webdatacommons.org/88966182

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Plasma reactions such as ashing, etching and polymer surface modifications can be performed. 11 in. dia. x 19 in. quartz process chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	exdat.com