| http://www.w3.org/ns/prov#value | - Also, the pressure inside the chamber 1 can be adjusted by the process controller 21 by, e.g., controlling driving of the exhaust unit (not shown) and a gas introduction amount from the gas source13.Recipes with control programs and process condition data recorded therein may be stored in a computer readable storage medium, such as a CD-ROM, hard disk, flexible disk, or flash memory.
|
