About: http://webisa.webdatacommons.org/8908198

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the substrate is silicon, but other materials are possible, such as ceramics, or polymers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca