About: http://webisa.webdatacommons.org/89126435

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Apparatus according to claims 49, 50 or 51, wherein said laser is an excimer laser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com