About: http://webisa.webdatacommons.org/89143083

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A pump, such as a bellows pump, is used to drip the resist solution onto the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es