About: http://webisa.webdatacommons.org/89367584

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, the upper layer 41 of the source line is formed of a metal compound of silicon, such as NiSi, MoSi, TiSi or CoSi, having a thickness of, e.g. about 10 nm to 300 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com