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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	U.S. Pat. No. 4,960,726 of Lechaton et al BICMOS Process" describes deep trenches which are lined with an insulating material such as silicon dioxide and filled with a filler material such as polysilicon or an insulator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com