About: http://webisa.webdatacommons.org/89538897

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	act holes CH and the grooves M. This barrier metal film 305 is formed by a material such as Ta, Ti, TaN, or TiN by well-known sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com