PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Dashed line 48 a illustrates the effects of an anisotropic etch using for example EDP or KOH, dashed line 48 b shows the effects of an isotropic etch, and dashed line 48 c shows the effects of other anistropic etches, for example using reactive ion etching (RIE), to achieve a different etching profile.
http://www.w3.org/ns/prov#wasQuotedFrom
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