About: http://webisa.webdatacommons.org/89989119

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating film including silicon is formed in thickness from 100 to 200 nm as the first passivation film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au