About: http://webisa.webdatacommons.org/89993620

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIGS. 2A-2E, however, the raised features represent areas of a silicon substrate 20 between trenches etched in the substrate, such as trenches in a shallow trench isolation (STI) structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au