About: http://webisa.webdatacommons.org/89995478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with FIG. 3B, in a subsequent step, the mask layer 5 is patterned for example by conventional photolithographic or other methods and an intermediate layer is subsequently formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com