About: http://webisa.webdatacommons.org/90000432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment, the desired number of cycles for the hafnium metal sequence is a number of cycles to form a hafnium metal layer across the substrate providing a thickness of a few angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr