| http://www.w3.org/ns/prov#value | - Transfer chamber 502 is attached to an exhaust system such as a pump and a source of inert gas, such as nitrogen (N2) so that wafers can be transferred between the various process apparatuses in cluster tool 500 in a reduced pressure ambient or in an inert ambient so that wafers are not exposed to an oxidizing ambient or to sources of contamination.
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