About: http://webisa.webdatacommons.org/90133726

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An alternative route to active patterning and etching is to use nanoporous or mesoporous materials, such as zeolites, in which the holes/channels are backfilled with a highly conducting metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com