About: http://webisa.webdatacommons.org/90167662

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with one embodiment of the present invention the amorphous carbon layer is formed from a gas mixture of a hydrocarbon compound and an inert gas such as argon (Ar) or helium (He).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au