About: http://webisa.webdatacommons.org/90171298

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Instead of the silicon film, a film made of metal such as tungsten (W), tungsten nitride (WN) or ruthenium (Ru) may be formed on the etched hardmask 55 and on the inner surface of the hole 70.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com