About: http://webisa.webdatacommons.org/90222787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In such a process, the sacrificial gate electrode is formed first and thereafter the sacrificial gate electrode is replaced by a gate stack including a high-k gate dielectric and a metal gate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com