About: http://webisa.webdatacommons.org/90253835

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, this drift region may have, in particular in the region of the highly doped substrate layer, a lateral extent greater than the lateral extent of the trench of the gate electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com