About: http://webisa.webdatacommons.org/90270060

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, after deposition of dielectric layer 90, some embodiments of the present invention employ a planarization process, e.g. chemical mechanical polishing (CMP), to planarize layer 90.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com