About: http://webisa.webdatacommons.org/90454958

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Process tool 12 may be any tool wherein a work piece, such as a semiconductor wafer, undergoes one or more processing steps.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com