About: http://webisa.webdatacommons.org/90609250

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 3, there includes a substrate 18 having element isolation a spaced-apart region 30 for an active device, such as a source or drain region of a transistor (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com