About: http://webisa.webdatacommons.org/90804457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as shown in FIG. 2D, the openings 68, 70 can be at least partially filled with a conductive material such as a metal, or a conductive polymer, to form the conductive vias 38, 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com