About: http://webisa.webdatacommons.org/90993898

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 8, a substrate 30 is provided that is typically silicon but may be based on silicon-on-insulator, silicon-germanium, or other semiconductor materials used in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com