About: http://webisa.webdatacommons.org/91134935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a second embodiment, the interface comprises an atomic layer of silicon, a metal, and a mixture of nitrogen and oxygen in the form MSi[N1???Ox]2, where M is a metal and X is 0???X<1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca