About: http://webisa.webdatacommons.org/91210959

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, after the end of that etching cycle, a gas not including oxygen such as CH4 can be added.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com