| http://www.w3.org/ns/prov#value | - CF3 --(CF2)n --T'--SiZq (OA)3-q Further, for adjusting the hardness of the fluorocarbon-based polymer film, as the crosslinking agent may be use SiXs Cl4-s where X represents a hydrogen atom or a substituted group such as an alkyl group and s represents 0, 1, or 2, or
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