About: http://webisa.webdatacommons.org/91287270

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the spacer layer 130 is a barrier layer including an insulator such as alumina.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com