| http://www.w3.org/ns/prov#value | - 67005A1InventorsZhiyi Yu, Ravindranath Droopad, Corey OvergaardOriginal AssigneeMotorola, IncExport CitationBiBTeX, EndNote, RefManReferenced by (7), Classifications (20), Legal Events (1) External Links: USPTO, USPTO Assignment, EspacenetSemiconductor structure including low-leakage, high crystalline dielectric materials and methods of forming same
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