| http://www.w3.org/ns/prov#value | - In another embodiment, a gas comprising a noble gas and a reducing gas (such as a noble gas/reducing gas volume ratio between about 99:1 and about 90:10, preferably about 4% reducing gas) can be flowed into the chamber to provide a reducing environment to suppress oxide formation or to convert metal oxides to metals, such as copper oxides to copper.
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