About: http://webisa.webdatacommons.org/91371462

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An n-type impurity such as phosphorus or arsenic is implanted into the side walls of RESURF layers 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com