| http://www.w3.org/ns/prov#value | - IV.A. Optionally, at the coating station 28 the vacuum source 98 makes a seal with the puck or vessel holder 50 that can be maintained during movement of the vessel holder, if the process is a continuous process in which the tube is moved through the coating station such as 28 while a vacuum is drawn and gas is introduced through the probe 108.
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