About: http://webisa.webdatacommons.org/91377929

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulation layer including silicon, is then formed on the second MgTiO3 film opposite the conductive layer and conductive layer sidewall and opposite the ferroelectric film sidewall.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com