About: http://webisa.webdatacommons.org/91575383

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	T-frame 100, inverted-U frame 102, and extensible positioners 86 are monolithically formed froma solid layer of x-ray lithographically deposited material such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com