About: http://webisa.webdatacommons.org/91689221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic diagram of a measurement and control system of the present invention for a chemical wet bath.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au