About: http://webisa.webdatacommons.org/91698564

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a graph showing a magnetic field distribution characteristic of the plasma etching apparatus of FIG. 15.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com