About: http://webisa.webdatacommons.org/9173629

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment mode, an optical system in the case where a light irradiation apparatus having an optical element according to the present invention is an exposure apparatus will be explained with reference to FIGS. 6A and 6B.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es