About: http://webisa.webdatacommons.org/91835169

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Like the insulation layers 47, 48, the insulation layers 74 in the vias 72 can comprise an electrically insulating material, such as a polymer (e.g., polyimide or parylene) or an oxide (e.g., SiO2).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com