About: http://webisa.webdatacommons.org/92032128

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 4c, by using vapor deposition such as sputtering, a metal such as aluminum is deposited on the protective film 2 to cover the heating resistor layer 11 so that the metal layer 3??? is formed on the base plate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com