About: http://webisa.webdatacommons.org/92118608

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Needless to say, other drive mechanisms, such as belt drive mechanisms, may be employed instead.Fifth, any solution other than the resist solution used in the first embodiment may be applied to the wafer 1 to form a film thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com