About: http://webisa.webdatacommons.org/92373573

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1, a pad structure 10 is conventionally formed on a semiconductor substrate 12, which is formed from a material such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com