About: http://webisa.webdatacommons.org/92398339

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Reactant gases, such as a mixture including nitrogen, oxygen and carbon tetrafluoride are brought into the reactor through inlet 28 and cavity 24.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com