About: http://webisa.webdatacommons.org/92580882

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A metal such as W, Pd, Pt, Ni, Mo, Nb, Ta or other metals which may be deposited on the silicon layer by the halide reduction may be used for the metal here.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com