About: http://webisa.webdatacommons.org/9268338

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 104, a package substrate layout dataset in a first format, such as a format used for multi-chip module (MCM) package layout, is generated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com